SymplicitY™ UHP Manual Panel
SDC’s non-hazardous gas managment product line expands the possibilities of your Ultra-High-Purity process gas distribution with the redesigned SymplicitY™ manual-switchover panel. Its modular system design supports up to eight (8) points-of-use with minimal additional capital equipment investment. The SymplicitY™ is ideal for manual-switchover of cylinders and dewars.
This SymplicitY™ UHP non-haz gas panel safely and conveniently delivers a wide variety of gases in a user friendly, cost conscious package. The simple layout allows for easy operation of all gas panel functions. All valves are clearly marked to ensure accurate panel functionality. All plumbing assemblies are mounted to an aluminum backplane that can be easily mounted to SDC’s FastRack™ or a customer supplied structure.
When the primary supply cylinder becomes depleted, the customer can effortlessly switch to the reserve cylinder. The depleted cylinder can now be replaced without affecting delivery from the new primary cylinder, greatly reducing costly downtime.
Process purity levels are ensured through the use of top quality 316L and VAR SS tubing and components. All UHP wetted flow paths including purge panels, pigtails, and other dynamic pressure bearing components are welded by ASME Section IX Certified Weld Technicians.
Procedure Includes
- Procedure Qualification of Record
- Welding Procedure Specifications
- Welder Performance Qualifications
Process Panel Features
- Reserve of process gas
- Ultra Pure package design
- Expandability
- Clean cylinder change-out with pigtail vent
- Ultra-Pure cylinder/dewar change-out with P-Vac™
option
Standard Configurations
- Expandable to eight (8) points-of-use
- Primary regulation
- Indicating pressure switchesor gauges for each cylinder
- Delivery pressure gauge
- Pigtail vent to remove potential contamination
during cylinder change-out. (For systems purchased without the PURGE/EVAC option) - Vent check valves to prevent back streaming
- Minimized DEAD LEG process gas path
- UHP 316L SS or VAR components, fittings, and tubing
Dimensions
- 24”W x 25”H
Options
- P-Vac™ manifold
- HIGH FLOW model
- Point-of-use regulation (up to 8)
- Dual stage primary regulator
- Optional filtration
Codes and Standards
- ASME Section IX
- OSHA 29 CFR 1910, subparts S and H
- NFPA® 79 Electrical Safety for Industrial Machinery
- Semi S2 Safety Guidelines for Semiconductor Manufacturing Equipment
- Semi S8-95 Safety Guidelines for Ergonomical/Human Factors Engineering of Semiconductor Manufacturing
Exhaust Specifications & Requirements
Purge/EVAC gas (w/ P-vac™ option only) | adjustable to 75 psig | 85 slm max. |
Process Vent | >1.0" - 2.0" WC or ambient | 100 slm max. |