CiphercoN™ Mini-Purge Fully Automated Gas Cabinet
The CiphercoN™ Mini-Purge fully-automated hazardous gas cabinet is a re-packaged wall-mount version of the widely successful full size 1500. This miniature fully-automated gas cab boasts all of the same features, component quality, UHP construction and safety of the CiphercoN™ 1500. Housing one process cylinder (up to 19"H x 8"D), the Mini-Purge utilizes time-proven PLC controlled auto-sequenced routines for all critical aspects of operations and maintenance. The bright 7.5" color touch screen intuitively guides the user through online operations, cylinder change-out, diagnostics and more.
From the Fab to the Lab, SDC puts first tier semiconductor grade safety and quality within reach. For less hazardous applications, be sure to see the FlexGas Mini-semi-automated wall mount gas cabinet.
The CiphercoN™ Mini-Purge makes it simple to meet your exact gas delivery needs. Our modular design concept allows for component-level replacement, ease of service and upgradeability. Start customizing right at the gas panel level with standard choices for regulator type, valve type, transducer ranges and purity level. Just like the full size 1500 cabinet, you can zero in further with a myriad of options like integrated scales, onboard gas leak detection, purgeable splitters, RFO, filtration, purification, and many more. SDC's SPEC √ ™ checklist will walk you through this process in a simple, step-by-step manner. Our Sales Engineers are always available to work through the customization process with you too, either by phone, or in person.
Control Features
- PLC control of all critical functions
- Bright 7.5" color touch screen interface
- Proven auto-sequenced routines for all aspects of operations and maintenance
- User settable limits for all process and alarm parameters
- Exhaust pressure monitor
- On-screen warnings, alarms, prompting and instructions
- Emergency Off (EMO)
- EMO and EGO inputs
- Hazard & Process Alarm outputs
- Multi-level password protection
- Diagnostics screen
- Valve cycle count screen
- Z-Purge ready for Class I Div II compliance
Process Panel Features
- Ultra-High-Purity (UHP) 316L SS or VAR construction
- Surface finish 10 Ra avg. or better
- Springless diaphragm valves
- UHP process regulator
- Precision flow sensor
- Vacuum assisted purging
- UHP orbitally welded with strategic VCR® breaks
- Helium leak tested to 1.0 x 10-9 atm*cc/s
- CLASS 100 / CLASS 10 clean room assembly and tested
Standard Configurations
- 1-cyl, [1-process]
Dimensions
- 1 cyl. - 18"W x 36"H x 18"D (height dimensions include controller. Add 6.0" to width with cylinder heating option.)
Options
Codes and Standards
- ASME Section IX
- SEMI™ S2 Safety Guidelines for Semiconductor Manufacturing Equipment
- NFPA® 79, 496, 70 [NEC®]
- Factory Mutual®
- UL®
- CE®
Exhaust Specifications & Requirements
Pneumatic Supply | adjustable to 90 psig | 1 slm max. |
Process Purge | adjustable to 80 psig | 30 slm max. |
Vacuum Drive |
adjustable to 85 psig | 85 slm max. |
Process Vent | >1.0" WC | 100 slm |
Power | 110V / 3A | N/A |
Sprinkler (if used) | 30 psig | 31 gpm |
Exhaust* | 0.15" WC | 200 scfm (2-cyl) |