CiphercoN™ 1500 Silane Rack

The CiphercoN™ 1500 Fully Automated Outdoor Silane (SiH₄) Gas Cylinder Rack is representative of SDC®'s continuous drive and commitment to providing the industry’s most reliable Ultra- High-Purity (UHP) specialty gas equipment available. Mass customization and modular design concepts of the gas panels & controls architecture have combined to widen the product configuration spectrum and greatly increase user flexibility.

From the Fab to the Lab, SDC® sets itself apart as the clear choice for value in today’s budget - conscious environment.

The CiphercoN™ 1500 outdoor silane (SiH₄) gas cylinder rack can also be configured for bulk silane (SiH₄) delivery which makes it simple to meet your exact gas delivery needs. Our 1500 product line modular design concept allows for component level replacement, ease of service and upgradeability. Begin by choosing one of several "core" gas rack configurations. Start customizing right at the gas panel level with standard choices for regulator type, valve type, transducer ranges and purity level. Zero in further with a myriad of options like purgeable splitters, RFO, filtration, purification, and many more. SDC®'s SPEC √ ™ checklist will walk you through this process in a simple, step-by-step manner. Our Sales Engineers are always available to work through the customization process with you too, either by phone or in person.

• PLC control of all critical functions
• Bright 10.4" color touch screen interface
• Proven auto-sequenced routines for all aspects of operations and maintenance
• User settable limits for all process and alarm parameters
• Exhaust pressure monitor
• On-screen warnings, alarms, prompting and instructions
• Emergency Off (EMO)
• EMO and EGO inputs
• Alarm outputs
• Multi-level password protection
• Diagnostics screen
• Valve cycle count screen
• Z-Purge ready for Class I Div II compliance

• Ultra-High-Purity (UHP) 316L SS or VAR construction
• Surface finish 10 Ra avg. or better
• Springless diaphragm valves
• Tied-diaphragm process regulator
• Precision flow sensor
• Vacuum assisted purging
• UHP orbitally welded with strategic VCR® breaks
• Helium leak tested to 1.0 x 10^-4 atm-cc/s
• CLASS 100 / CLASS 10 cleanroom assembly and tested

• 2-cyl, [1-process, 1-purge]
• 2-cyl, [2-process], external purge source
• 3 cyl, [2-process, 1-purge]
• Independent out or autoswitchover

• 2 cyl: 36"W x 83.25"H x 24"D
• 3 cyl: 52"W x 83.25"H x 24"D

* Height dimensions include controller. Add 6.0" to width with cylinder heating option.

• SME Section IX
• SEMI™ S2 Safety Guidelines for Semiconductor Manufacturing Equipment
• NFPA® 79, 496, 70 [NEC®]
• Factory Mutual®
• UL®
• CE®
• CGA G-13