Liquid Chemical Delivery

The SDC PureCursor™ LDS (TEOS liquid delivery system) is an Ultra-High-Purity liquid chemical delivery system designed for use in CVD and other applications. The single container PureCursor™ LDS is a fully-automated system using a pressure dispense method. It is capable of housing vessel sizes up to 90 liters (depending on the chemical supplier.) Fitted with its optional purgeable splitter manifold, the PureCursor™ can independently deliver to 2, 3 or 4 points-of-use.

The PureCursor™ LDS can be configured as a small single source system or as a bulk auto-switchover system for higher usages and uninterrupted supply. Let SDC configure a budget-conscious unit that meets your exact requirements.

• PLC control of all critical functions
• Bright 10.4" color touch screen interface
• Proven auto-sequenced routines for all aspects of operations & maintenance
• User settable limits for all process and alarm parameters
• Exhaust pressure monitor
• On screen warnings, alarms, prompting and instructions
• Emergency Off [EMO]
• EMO and EGO inputs
• Alarm outputs
• Multi-level password protection
• Diagnostics screen
• Valve cycle count screen
• Z-Purge ready for Class I Div II compliance

• Ultra-High Purity [UHP] 316L SS or VAR
• Surface finish 10Ra
• Springless diaphragm valves
• Precision pressure transducers
• UHP orbitally welded w/strategic VCR® breaks
• Helium leak tested to 1 x 10-9 atm*cc/s
• CLASS 100 / CLASS 10 clean room assembly and test

• 1-container, [independent out]
• 2-container, [auto-switchover]
• 11 gauge, fully seam-welded enclosure
• 110% spill containment
• Sump liquid leak sensor
• Self-closing, self-latching door and access door

• ASME Section IX
• SEMI S-2
• NFPA® 79, 496, [NEC®]
• Factory Mutual®
• CE®