SymplicitY™ UHP Semi-Auto Panel
The SymplicitY™ UHP gas panel with auto-switchover is an Ultra-High-Purity gas panel designed for uninterrupted supply of gas to one or more points-of-use.
The heart of this cost-effective process gas panel is the changeover regulator. When the primary supply cylinder comes close to depletion, the changeover regulator automatically begins intake from the second cylinder while delivering at a slightly lower delivery pressure. This pressure is raised by simply rotating the regulator handle 180 degrees. The depleted cylinder can now be replaced without affecting delivery from the new primary cylinder. SDC surrounds this regulator with a HP design that offers safety, purity and performance in a budget minded package.
The optional StatBox™ provides an audible and visual alarm when any one of the cylinders reaches its preset depletion limit. ONLINE, SIDE “A” DEPLETED, and SIDE ”B” DEPLETED LED’s provide quick visual status while the piezo audibly alarms when activated.
Process purity levels are ensured through the use of top quality 316L SS or Ni plated brass tubing and components. The flow paths include the switchover regulator, valves, gauges, fittings, CGA’s, optional check valves, and secondary regulator. Optional flex pigtails are SS w/SS overbraid.
Control Features
- PLC control of all critical functions
- 4-Line backlit LCD character display interface
- Membrane touch-pad user interface
- Proven auto-sequenced routines for all aspects of operations & maintenance
- User settable limits for all process and alarm parameters
- On screen warnings, alarms, prompting and instructions
- EMO and EGO inputs
- Alarm outputs
- Multi-level password protection
Process Panel Features
- Scale or pressure based auto-switchover
- Expandable to six (6) points of use
- Primary regulation
- Indicating pressure switches for each cylinder
- Delivery pressure gauge
- Pigtail vent systems purchased without the PURGE/EVAC option
- Vent check valves to prevent back streaming
- Minimized DEAD LEG process gas path
- All UHP/Semiconductor grade components
Standard Configurations
- 1-cylinder x 1-cylinder
- 1-dewar x 1-dewar
- 1-dewar x 1-cylinder
- ½" HI-FLOW Model
Dimensions
- 24"H x 24" W
Options
- HIGH FLOW model
- Cylinder or dewar scales
- Point-of-use regulation (up to 8)
- Dual stage primary regulator
- Filtration
- 5 and 10 Ra finishes
Codes and Standards
- ASME® Section IX
- OSHA® 29 CFR 1910, subparts S and H
- NFPA® 79 Electrical Safety for Industrial Machinery
- SEMI® S2 Safety Guidelines for Semiconductor Manufacturing Equipment
- SEMI® S8-95 Safety Guidelines for Ergonomics/Human Factors Engineering
Exhaust Specifications & Requirements
Pneumatic Supply | adjustable to 90 psig | 1 slm max. |
1Process Purge | adjustable to 80 psig | 85 slm max. |
1Vacuum Drive | adjustable to 85 psig | 85 slm max. |
Process Vent | >1.0" WC | 100 slm |
Power | 115V / 3A | N/A |
1Needed with PURGE/EVAC option only.