CiphercoN™ 1500 VMB
The CiphercoN™ 1500 valve manifold box, sister product to the popular CiphercoN™ 1500 hazardous-gas cabinet, is another example of our drive and commitment to providing the industry’s safest and most reliable Ultra-High-Purity (UHP) specialty gas equipment on the market. Our mass customization and modular design concepts of the gas sticks and controls architecture have combined to widen the product configuration spectrum and greatly increase user flexibility.
The CiphercoN™ 1500 VMB supports simple dry-contact communication for hazard alarms, process alarms, tool call, external EMO, external EGO and more. If your gas management solution requires more sophisticated communication, the 1500 VMB also supports Ethernet using open Modbus7Trade TCP protocol. This allows the CiphercoN™ 1500 to be easily integrated into most new and existing SCADA systems. From the Fab to the Lab, SDC® sets itself apart as the clear choice for value in today’s budget conscious environment.
The CiphercoN™ 1500 VMB also makes it simple to meet your exact gas delivery needs. Our modular design concept allows for component-level replacement, ease of service and upgradeability. Start customizing right at the gas panel level with standard choices for regulator type, valve type, transducer ranges and purity level. Zero in further with a host of options like integrated scales, onboard gas leak detection, purgeable splitters, RFO, filtration, purification, and many more. SDC's SPEC √ ™ checklist will walk you through this process in a simple, step-by-step manner. Our Sales Engineers are always available to work through the customization process with you too, either by phone, or in person.
Control Features
- PLC control of all critical functions
- Resistance Heating High Temperature Furnace
> 1250 °C - Proven auto-sequenced routines for all aspects of operations and maintenance
- User settable limits for all process and alarm parameters
- Exhaust pressure monitor
- On-screen warnings, alarms, prompting and instructions
- Emergency Off (EMO)
- EMO and EGO inputs
- Alarm outputs
- Multi-level password protection
- Diagnostics screen
- Valve cycle count screen
- Z-Purge ready for Class I Div II compliance
Process Panel Features
- Ultrahigh Purity [UHP] 316L SS or VAR construction
- Standard surface finish 10 Ra average or better
- Vacuum assisted purging
- UHP orbitally welded with strategic VCR® breaks
- Helium leak tested to 1.0 x 10-9 atm-cc/s
- CLASS 100/CLASS 10 clean room assembly and test
Standard Configurations
- 4-stick [0-4 sticks populated]
- 8-stick [0-8 sticks populated]
- Resistance Furnace for Temperatures >1100 °C
Dimensions
- 28"W x 44"H x 18"D
Options
- Regulation
- Transducer [gauge standard]
- Excess flow sensor
- Filtration
- Gas leak sensor
- UV/IR
- UL®
Codes and Standards
- ASME Section IX
- SEMI™ S2 Safety Guidelines for Semiconductor Manufacturing Equipment
- NFPA® 79, 496, 70 [NEC®]
- Factory Mutual®
- UL®
- CE®
Exhaust Specifications & Requirements
Pneumatic Supply | adjustable to 90 psig | 1 slm max. |
Process Purge | adjustable to 80 psig | 30 slm max. |
Vacuum Drive |
adjustable to 85 psig | 85 slm max. |
Process Vent | >1.0" WC | 100 slm |
Power | 115V / 5A | N/A |
Sprinkler (if used) | 30 psig | 31 gpm |
Exhaust | 0.1 H2O | 250 scfm |